ST's ultra-small silicon pressure sensors use innovative MEMS technology to provide extremely high resolution measurements of pressure, and therefore also of altitude, in ultra-compact and thin packages. The devices are designed using ST’s VENSENS technology; this allows the pressure sensor to be fabricated on a monolithic silicon chip, so eliminating wafer-to-wafer bonding and maximizing reliability. The membrane is very small compared to traditional silicon micro-machined membranes and is protected from breakage by built-in mechanical stoppers.
Noise has a considerable effect on system accuracy when determining altitude. ST has reduced the noise of the sensor to a minimum. This enables to detect differences within centimeters of altitude variations.
ST’s pressure sensors are designed to enhance GPS for indoor and outdoor navigation, to measure precise altitude, or as a barometer in smartphones, tablets, sports watches, weather stations, and automotive and industrial applications.
LPS25H ultra-compact pressure sensor
The LPS25H integrates the MEMS sensing element and IC interface in the same package. The sensing element detects absolute pressure and consists of a suspended membrane realized inside a single mono-silicon substrate. An intrinsic mechanical stopper protects against membrane breakage. ST’s advanced manufacturing process technology enables a significantly smaller membrane size compared to traditionally built silicon micro-machined membranes.
The unique features of this sensor include enhanced temperature compensation which allows apps to perform consistently in changing environments. In addition, auto-zero capability allows instant accuracy upon entering a building together with additional value-added features like thresholds and interrupts. In addition to mobile applications, ST’s LPS25H is also used in wearable, industrial, and smart-home systems.