| Vol. 3, No. 1, August 2006- Art. 5 |
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| Electrostatic analysis of a comb-finger actuator with
Schwarz–Christoffel conformal mapping |
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by
P. Bruschi, A. Nannini, F. Pieri, G. Raffa, University of
Pisa, B. Vigna, S. Zerbini, STMicroelectronics
Copyright
Copyright © Elsevier, 2004 - Reprinted from Sensors
and Actuators A 113 (2004) 106–117, doi:10.1016/j.sna.2004.02.038
http://www.elsevier.com/wps/find/
journaldescription.cws_home/ 504103/description#description
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| Abstract
The design and the analysis of a comb-finger actuator require
the evaluation of the coupling capacitances as well as the estimation
of the electrostatic forces. Several approaches are possible:
very rough approximations based on combinations of parallel plate
capacitor elements, analytical or numericalSchwarz-Christoffel
conformal mapping based techniques, numerical solutions of the
electrostatic field equations. Powerful numerical approaches can
be very accurate, but heavy and time-consuming, while simple approaches
are very inaccurate. A partially analytical approximate method
based on Schwarz-Christoffel conformal mapping is discussed.
The comparison with results from standard simulators and experimental
measurements demonstrates that the studied procedure is fast and
satisfactorily accurate.
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