| Vol. 3, No. 1, August 2006- Art. 9 |
| |
| A simple lumped electrical model for an RF MEMS switch
considering lossy substrate effects |
|
 |
by
Giuseppe Cusmai, Marco Mazzini, Paolo Rossi, Francesco Svelto,
University of Pavia; Chantal Combi, Benedetto Vigna, STMicroelectronics
Copyright
Copyright © Elsevier, 2005 - Reprinted from Sensors
and Actuators A 123–124 (2005), 515–521, http://www.elsevier.com/wps/find/journaldescription.cws_home/
504103/description#description |
| | |
|
Abstract
This work focuses on Micro-Electro-Mechanical-Systems (MEMS)
capacitive switches, intended for adaptive output stage of power
amplifiers. These devices are particularly attractive because,
theoretically, they are capable of very high quality factor values
due to the air gap between plates and the low resistivity of lines
and bridge. On the other hand, substrate parasitic effects, overlooked
up to now, can seriously impair device performance.
In this paper, we introduce a lumped element equivalent circuit
taking into account substrate effects. Model validation is based
on measurements carried out in the 50MHz-40GHz range.
|
| |
| |
|
