LISY300AL
MEMS inertial sensor: single-axis 300/s analog output yaw rate gyroscope
Features
2.7 V to 3.6 V single supply operation Low power consumption Embedded power-down 300 /s full scale Absolute analog rate output Integrated low-pass filters Embedded self-test High shock survivability ECOPACK RoHS and "Green" compliant (see Section 4)
LGA-28 (7x7x1.5mm)
Description
The LISY300AL is a low-power single-axis yaw rate sensor. It includes a sensing element and an IC interface able to provide the measured angular rate to the external world through an analog output voltage. The sensing element, capable of detecting the yaw rate, is manufactured using a dedicated micromachining process developed by ST to produce inertial sensors and actuators on silicon wafers. The IC interface is manufactured using a CMOS process that allows a high level of integration to design a dedicated circuit which is trimmed to better match the sensing element characteristics. The LISY300AL has a full scale of 300 /s and is capable of measuring rates with a -3 dB bandwidth up to 88 Hz. The LISY300AL is available in a plastic land grid array (LGA) package and can operate within a temperature range from -40 C to +85 C. The LISY300AL belongs to a family of products suitable for a variety of applications, including: Gaming and virtual reality input devices Motion control with MMI (man-machine interface) Image stabilization for digital video and digital still cameras GPS navigation systems Appliances and robotics
Table 1. Device summary
Order code LISY300AL LISY300ALTR Temperature range (C) -40 to +85 -40 to +85 Package LGA-28 (7x7x1.5) LGA-28 (7x7x1.5) Packing Tray Tape and reel
May 2008
Rev 1
1/13
www.st.com 13
Contents
LISY300AL
Contents
1 Block diagram and pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2
Mechanical and electrical specifications . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 2.2 2.3 2.4 Mechanical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 Electrical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.4.1 2.4.2 2.4.3 Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Zero-rate level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Self-test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3
Application hints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.1 Soldering information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4 5
Package information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
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LISY300AL
Block diagram and pin description
1
Block diagram and pin description
Figure 1. Block diagram
+
CHARGE AM PL IFIER
DEMODULATOR SW I T C H ED CAPACITOR LOW-PASS FILTER
z
Sens+
ACTIVE LOW-PASS FILTER ANALOG OUTPUT
Sens-
Feedback+
TRANSIMPEDANCE AMPLIFIER
ANALOG CONDITIONING
FeedbackDrive-
VOLTAGE G AI N AM PL IFIER
Drive+
PID control
AUTOMATIC GAIN CONTROL
PLL
REFERENCE
TRIMMING CIRCUITS
CLOCK
PHASE GENERATOR
The vibration of the structure is maintained by a drive circuitry in a feedback loop. The sensing signal is filtered and appears as an analog signal at the output.
1.1
Pin description
Figure 2. Pin connection
FILTVDD
Vdd
Vdd
Vdd
NC
28 NC 1 GND GND NC CACT ANALOG OUTPUT NC 7
22 21 Reserved Reserved Reserved Reserved Reserved Reserved 15 NC
LISY300AL
(TOP VIEW)
Reserved
Reserved
(TOP VIEW) DIRECTION OF THE DETECTABLE ANGULAR RATE
8 NC NC PD ST
14 NC
NC
+
z
VCONT
3/13
Block diagram and pin description Table 2.
Pin # 1 2 3 4 5 6 7-9 10 11 12-13 14-15 16-21 22 23 24 25 26 27 28
LISY300AL
Pin description
Pin Name NC GND GND NC CACT ANALOG OUTPUT NC PD ST Reser ved NC Reser ved NC VCONT FILTVDD Vdd Vdd Vdd NC Internally not connected 0V supply 0V supply Internally not connected Active filter capacitor Rate signal output voltage Internally not connected Power-down (logic 0: normal mode; logic 1: power-down mode) Self-test (logic 0: normal mode; logic 1: self-test) Leave unconnected Internally not connected Leave unconnected Internally not connected PLL filter connection pad #1 PLL filter connection pad #2 Power supply Power supply Power supply Internally not connected Function
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LISY300AL
Mechanical and electrical specifications
2
2.1
Table 3.
Symbol FS So SoDr Voff OffDr NL BW Rn Vt Sup Fres Top Wh
Mechanical and electrical specifications
Mechanical characteristics
Mechanical characteristics @ Vdd = 3.3 V, T = 25 C unless otherwise noted(1)
Parameter Measurement range Sensitivity Sensitivity change vs. temperature Zero-rate level(3) Zero-rate level change From -40 C to +85 C vs. temperature Non linearity(4) -3dB bandwidth
(3)(5)
Test condition
Min.
Typ.(2) 300 3.3
Max.
Unit /s mV/ /s % V /s % FS Hz /s / Hz mV ms kHz
From -40 C to +85 C
4 1.65 5 0.8 88 0.1 +300
Best fit straight line CACT = 10 nF
Rate noise density Self-test output voltage change(6) Star t-up time Sensing element resonant frequency Operating temperature range Product weight -40 Settling to 5 /s
300 4.5 +85 160
C mg
1. The product is factory calibrated at 3.3 V. The operational power supply range is specified in Table 4. 2. Typical specifications are not guaranteed 3. The product is capable of sensing angular rates extending from DC to the selected bandwidth 4. Guaranteed by design 5. User selectable by external capacitor CACT 6. "Self-test output voltage change" is defined as Vout(Vst = logic 1) - Vout(Vst = logic 0)
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Mechanical and electrical specifications
LISY300AL
2.2
Table 4.
Symbol Vdd Idd IddPdn
Electrical characteristics
Electrical characteristics @ Vdd =3.3 V, T=25 C unless otherwise noted(1)
Parameter Supply voltage Supply current Supply current in power-down mode Self-test input Logic 1 level Logic 0 level 0.8*Vdd 0 0.8*Vdd 10 Iout = 100A 0.4 0.4 -40 Vdd-0.4 10 +85 Vdd 0.2*Vdd V Logic 1 level Vdd nF V nF C PD pin connected to GND PD pin connected to Vdd Logic 0 level VST 0 Test condition Min. 2.7 Typ.(2) 3.3 4.8 1 0.2*Vdd V Max. 3.6 Unit V mA A
VPD
Power-down input Active low-pass filter capacitor Output voltage swing(3) Capacitive load drive(3)
CACT OVS CLOAD Top
Operating temperature range
1. The product is factory calibrated at 3.3 V 2. Typical specifications are not guaranteed 3. Referred to ANALOG OUTPUT pin #6
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LISY300AL
Mechanical and electrical specifications
2.3
Absolute maximum ratings
Stresses above those listed as "Absolute maximum ratings" may cause permanent damage to the device. This is a stress rating only and functional operation of the device under these conditions is not implied. Exposure to maximum rating conditions for extended periods may affect device reliability. Table 5.
Symbol Vdd Vin AUNP TSTG ESD Supply voltage Input voltage on any control pin (PD, ST) Acceleration (not powered) 10000 g for 0.1 ms Storage temperature range Electrostatic discharge protection -40 to +125 2 (HBM) C kV
Absolute maximum ratings
Ratings Maximum value -0.3 to 6 -0.3 to Vdd +0.3 3000 g for 0.5 ms Unit V V
This is a mechanical shock sensitive device, improper handling can cause permanent damage to the part This is an ESD sensitive device, improper handling can cause permanent damage to the part
7/13
Mechanical and electrical specifications
LISY300AL
2.4
2.4.1
Terminology
Sensitivity
A yaw rate gyroscope is a Z-axis rate device that produces a positive-going output voltage for counterclockwise rotation around the axis normal to the package top. Sensitivity describes the gain of the sensor and can be determined by applying a defined angular velocity to it. This value changes very little over temperature and also very little over time.
2.4.2
Zero-rate level
Zero-rate level describes the actual output signal if there is no angular rate present. For a 3.3 V powered sensor the absolute zero-rate output is ideally 1.65 V. Zero-rate level of precise MEMS sensors is, to some extent, a result of stress to the sensor and therefore zero-rate level can slightly change after mounting the sensor onto a printed circuit board or after exposing it to extensive mechanical stress. This value changes very little over temperature and also very little over time.
2.4.3
Self-test
Self-test allows to test the mechanical and electric part of the sensor, allowing the seismic mass to be moved by means of an electrostatic test-force. The Self-test function is off when the ST pin is connected to GND. When the ST pin is tied to Vdd, an actuation force is applied to the sensor, emulating a definite Coriolis force. In this case the sensor output will exhibit a voltage change in its DC level which is also depending on the supply voltage. When ST is active, the device output level is given by the algebraic sum of the signals produced by the velocity acting on the sensor and by the electrostatic test-force. If the output signals change within the amplitude specified in Table 3, then the mechanical element is working properly and the parameters of the interface chip are within the defined specification.
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LISY300AL
Application hints
3
Application hints
Figure 3. LISY300AL electrical connections and external components values
+
z
C2
9nF GND 10 F GND VDD 100 nF 450nF 9.5kOhm
C1
R1
1 2
Optiona l Low-pass filter
28 27 26 25 24 23 22 21 20 19 18 17 16 15 8 9 10 11 12 13 14
3
GND
VoutYAW
ROPT
CACT
4 5 6 7
LISY300AL (top view)
0.4nF
COPT
GND GND
CLOAD
PD
Digital signals
Power supply decoupling capacitors (100 nF ceramic or polyester + 10 F Aluminum) should be placed as near as possible to the device (common design practice). The LISY300AL allows to band limit the output rate response through the use of two firstorder on-chip filters: a switched capacitor low-pass filter, with 400Hz -3dB bandwidth, in combination with an active low-pass filter. The active filter -3 dB nominal frequency (ftA) is set through an internal resistor RACT and the external capacitor CACT (added between CACT pin #5 and ANALOG OUTPUT pin #6), by the formula:
--f t A = ------------------------1----------------------2 RA C T CA C T
The value of the internal resistor RACT is 180 k while the external capacitor CACT is used to , select the signal bandwidth. The sensed frequency range spans from DC up to the selected bandwidth. In order to further reduce high-frequency noise, the LISY300AL supports an additional optional low-pass filter on ANALOG OUTPUT pin #6 (Figure 3). The cutoff frequency (ftP) is given by the formula:
1 f t P = --------------------------------------------------2 RO P T CO P T
ST
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Application hints
LISY300AL
The LISY300AL IC includes a PLL (phase locked loop) circuit to synchronize driving and sensing interfaces. Capacitors and resistors must be added at the FILTVDD and VCONT pads (as shown in Figure 3) to implement a second-order low-pass filter. Table 6 summarizes the PLL low-pass filter components' values. Table 6. PLL low-pass filter components' values
Component C1 C2 R1 Value 450 nF 10% 9 nF 10% 9.5 k 10%
3.1
Soldering information
The LGA package is compliant with the ECOPACK, RoHS and "Green" standard. It is qualified for soldering heat resistance according to JEDEC J-STD-020C. Leave "Pin 1 Indicator" unconnected during soldering. Land pattern and soldering recommendations are available at www.st.com/mems.
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LISY300AL
Package information
4
Package information
In order to meet environmental requirements, ST offers these devices in ECOPACK packages. These packages have a lead-free second level interconnect. The category of second level interconnect is marked on the inner box label, in compliance with JEDEC Standard JESD97. The maximum ratings related to soldering conditions are also marked on the inner box label. ECOPACK is an ST trademark. ECOPACK specifications are available at: www.st.com. Figure 4. LGA-28: mechanical data and package dimensions
mm DIM. MIN. A A2 A3 D E F G L L1 M N O P K 0.170 6.900 6.900 1.300 0.200 TYP. M AX . 1.600 0.0512 0.230 0.0067 0.0079 0.0091
mm inch
inch MIN. TYP. MAX. 0.0630
OUTLINE AND MECHANICAL DATA
7.000 . 7.100 0.2717 0.2756 0.2795 DIM
MIN. TYP. M AX . 1.600 MIN. TYP. MAX. 0.0630
7.000
A
7.100 0.2717 0.2756 0.2795
1.300 0.170 6.900 6.900 0.200 7.000 7.000 0.350 0.800
OUTLINE AND MECHANICAL DATA
A2 0.350
0.0138 0.0315
0.0512
0.800
A3 D
0.230 0.0067 0.0079 0.0091 7.100 0.2717 0.2756 0.2795 7.100.01777 0.2756 0.2795 0 0.271
0.450 E
F 0.100 G
0.0039 0.0315
0.0138 0.0315 0.0177
0.800
L 0.450 0.100 0.800 1.600 4.800 2.400 0.050
1.600 L1 4.800 2.400
M N O
0.0630 0.1890 0.0945 0.0020
0.0039 0.0315 0.0630 0.1890 0.0945 0.0020
P 0.050 K
LGA28 (7x7x1.5mm) LaGA2Grid Array Package nd 8 (7x7x1.5mm) L
Land Grid Array Package
8003444 A
8003444 A
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Revision history
LISY300AL
5
Revision history
Table 7.
Date 29-May-08
Document revision history
Revision 1 Initial release Changes
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LISY300AL
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