IEEE MEMS 2022

IEEE MEMS 2022

Date: 9-13 January – Tokyo and online (hybrid format)
Check out the conference program and register now!
Go to the IEEE MEMS website

The 35th IEEE International Conference on Micro Electro-Mechanical Systems (IEEE MEMS) is one of the premier annual events reporting research results on all scientific aspects of micro/nanoscale devices, micro/nano-systems, as well as their relevant technologies and industrial trends. This conference brings together the nanotechnology research communities to discuss the latest successful advancements in MEMS.

STMicroelectronics confirms its Gold sponsorship for the 2022 edition and we are contributing with multiple authoritative research papers, both presented and co-authored and with an additional presentation. Check out the list below to find our innovations! This year’s edition will be held in a hybrid format from Tokyo. Save the date and start the new year with MEMS!

Date Time (JST) Title Speakers
11 Jan 22:00
23:30
Virtual Poster session 3B
Emerging Technologies and New Opportunities for MEMS/NEMS Nonlinear Dynamics in MEMS/NEMS

305 – Fast and accurate predictions of MEMS micromirrors nonlinear dynamic response using direct computation of invariant manifolds
Nicolò Boni, Roberto Carminati,
Gianluca Mendicino
ST co-authors
11 Jan 22:00
23:30
Virtual poster session III - Emerging Technologies & New Opportunities for MEMS/NEMS
MEMS ScanAR: a complete display solution for augmented reality applications
Elan Roth,
ST Presenter
11 Jan 22:00
23:30
Virtual Poster session 5B Emerging Technologies and New Opportunities for MEMS/NEMS Nonlinear Dynamics in MEMS/NEMS
307 - Reduced order modeling in a MEMS arch resonator exhibiting 1:2 internal resonance
Patrick Fedeli, Paola Carulli
ST co-authors
12 Jan 14:15 Paper Session X
Advanced Fabrication and Characterization
A defect-based MEMS phononic crystal slab waveguide
Luca Falorni,
ST co-authors
12 Jan 22:00
23:30
Virtual Poster session 5C
Industry MEMS and Advancing MEMS for Products and Sustainability Measurement Methods for Product Specs
510 - Electro-optical testing solution at wafer level for MEMS PZT micromirrors actuation and mechanical angle sensing
Alessandro Della Bitta,
ST presenter
12 Jan 22:00
23:30
Virtual Poster session 5F
MEMS Physical Sensors Inertial Sensors
521 – Thelma-Double: a new technology platform for manufacturing of high-performance MEMS inertial sensors
Federico Vercesi,
ST presenter
13 Jan 11:15 Paper Session XIII - Piezoelectric
Devices Efficient phase and quadrature control of a PZT resonant MEMS microscanner with piezoresistive position sensor
Luca Molinari, Raffaele Enrico Furceri, Marco Zamprogno, Roberto Carminati, Nicolò Boni
ST co-authors