IEEE MEMS 2023

IEEE MEMS 2023

Date: January 15-19 in Munich at the Science Congress Center (in person event!)
Check out the conference program and register now!
Go to the IEEE MEMS website

The 36th IEEE International Conference on Micro Electro-Mechanical Systems (IEEE MEMS) is one of the premier annual events reporting research results on all scientific aspects of micro/nanoscale devices, micro/nano-systems, as well as their relevant technologies and industrial trends. This conference brings together the nanotechnology research communities to discuss the latest successful advancements in MEMS.

STMicroelectronics is a gold sponsor for the 2023 edition

STMicroelectronics contributes to the IEEE MEMS conference with multiple authoritative posters, both presented and co-authored, and an additional presentation in the industry track. Check out the sessions below to discover our innovations!

This year’s edition will be held in person in Munich. Our specialists will showcase our latest innovative demos – visit us booth 22 to see our TMOS and ISPU in action!

Save the date and start the new year with MEMS!

 

Date Time (JST) Title Speakers
15 Jan 13
17
Industry session
The MEMS journey: the best is yet to come!
Anton HOFMEISTER
ST Presenter
16 Jan 13:45
23:30
Session III – MEMS inertial sensors and power MEMS
Paper: High sensitivity MEMS z-axis accelerometer with in-plane differential readout
Gabriele GATTERE, Manuel RIANI, Francesco RIZZINI, ST co-authors
16 Jan 13:45
15:45
Open poster session
M85-i: Piezoelectric MEMS for microparticles detection: alternative readout for mass detection
Luigi BARRETTA
ST presenter
17 Jan 13:30
15:30
Open poster session
T39-e: Andromeda: a flexible MEMS technology platform for a variety of piezoelectrically actuated micromirrors
Irene MARTINI
ST presenter
17 Jan 13:30
15:30
Open poster session
T62-f: on-MEMS-Chip compact temperature sensor for large volume, low cost sensor calibration
Paolo FRIGERIO, Politecnico di Milano Presenter Gabriele Gattere,
ST co-author
17 Jan 13:30
15:30
Open poster session
T84-i: High performance sputtered PZT PMUTS operating in the ultrasound imaging range reproducible at wafer-scale
Jihang LIU Institute of Microelectronics Presenter

Fabio QUAGLIA, Domenico GIUSTI, Laura CASTOLDI, Claudia PEDRINI, Luca BARABANI, Annachiara ESPOSITO, Luigi BARRETTA, Rossana SCALDAFERRI, Alberto LEOTTI, Adriyan HAMSAH, ST co-authors
17 Jan 13:30
15:30
Open poster session
T82-i: A novel class of motion sensors featured with an electric potential sensing channel
Enrico ALESSI,
ST presenter
17 Jan 13:30
15:30
Open poster session
T83-i: Detection of mass and material nature of microparticles by a piezoelectric MEMS
Francesco FONCELLINO,
ST presenter
18 Jan 13:30
15:30
Open poster session
W83-i: Electro-optical testing solution for TMOS MEMS sensor sensitivity assessment at wafer level
Roberta CARBONE,
ST presenter
18 Jan 13:30
15:30
Open poster session
W84-i: Piezoelectric actuator introduction for accurate positioning read/write element in hard disk drive (HDD)
Domenico GIUSTI,
ST presenter
18 Jan 13:30 15:30 Open poster session
W81-i: A MEMS-CMOS infra-red microsystem with in-sensor machine learning capabilities
Marco CASTELLANO,
ST presenter
18 Jan 13:30 15:30 Open poster session
W85-i: Sputtered PZT air-coupled PMUTS with wide bandwidth and long detection range for ranging applications

Mantalena SARAFIANOU, Institute of Microelectronics Presenter

Fabio QUAGLIA, Domenico GIUSTI, Laura CASTOLDI, Filippo D’ERCOLI, Riccardo TACCHINI, Alberto LEOTTI, Dao Hao SIM ST co-authors